Accurate Method for Determining Adhesion of Cantilever Beams

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Description

Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying.

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Michalske, T.A. & de Boer, M.P. January 8, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 14 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Laboratories, Albuquerque, NM, and Livermore, CA
    Place of Publication: Albuquerque, New Mexico

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Description

Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying.

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  • Journal Name: Journal of Applied Physics

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  • Other: DE00003203
  • Report No.: SAND99-0055J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 3203
  • Archival Resource Key: ark:/67531/metadc682202

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • January 8, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • Dec. 2, 2016, 7:05 p.m.

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Michalske, T.A. & de Boer, M.P. Accurate Method for Determining Adhesion of Cantilever Beams, article, January 8, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc682202/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.