Deposition of field emissions cathodes over large areas

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Field emission cathodes (FECs) with characteristics of cold emission, low voltage operation, high current density and microscopic size meet the requirements for an electron source for use in vacuum microelectronics. Deposition efforts have focused on evaporation techniques, as electron beam, to produce the size and shape of cathode required for efficient operation. After two decades of development, the convention for FEC synthesis involves coating with very high tolerances for thickness uniformity using a planetary substrate fixture and a long source-to-substrate distance. A further reduction in the operating voltage results by increasing the density of emitters through a reduction of cathode ... continued below

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7 p.

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Jankowski, A.F. & Hayes, J.P. April 3, 1997.

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Description

Field emission cathodes (FECs) with characteristics of cold emission, low voltage operation, high current density and microscopic size meet the requirements for an electron source for use in vacuum microelectronics. Deposition efforts have focused on evaporation techniques, as electron beam, to produce the size and shape of cathode required for efficient operation. After two decades of development, the convention for FEC synthesis involves coating with very high tolerances for thickness uniformity using a planetary substrate fixture and a long source-to-substrate distance. A further reduction in the operating voltage results by increasing the density of emitters through a reduction of cathode size and spacing. In addition, the objective of scaling the substrate size from small to large areas has compounded the manufacturing requirements to a point beyond that which is obtainable through modifications to the conventional FEC deposition process. We have been successful in a new alternative approach to design, assemble and operate a system that enables FEC synthesis over large areas through the control of deposition source divergence and step-and-repeat substrate handling.

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7 p.

Notes

INIS; OSTI as DE98050924

Other: FDE: PDF; PL:

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  • 40. annual technical conference on vacuum coatings and manufacturing technology, New Orleans, LA (United States), 12-17 Apr 1997

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  • Other: DE98050924
  • Report No.: UCRL-JC--126873
  • Report No.: CONF-9704240--
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 325142
  • Archival Resource Key: ark:/67531/metadc681582

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • April 3, 1997

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  • July 25, 2015, 2:20 a.m.

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  • April 6, 2017, 6:02 p.m.

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Jankowski, A.F. & Hayes, J.P. Deposition of field emissions cathodes over large areas, article, April 3, 1997; California. (digital.library.unt.edu/ark:/67531/metadc681582/: accessed August 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.