Field-emission cathode micro-electro-mechanical system technology for sensors, diagnostics, and microelectronics

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Description

We have investigated field-emission devices for applications in sensors, diagnostics, and micro-electronics. Field-emission devices micromachined from silicon and molybdenum have been fabricated and tested. Experimental results have shown that the presence of nitrogen gas molecules for pressures up to 1 mtorr has only a moderate impact on device emission performance, and has no long term effect on device operation. These results demonstrate that field-emission cathodes can potentially be used in sensors applications where gas ionization by election impact is desirable, or other applications in which the field-emission device is exposed to less than ideal vacuum conditions.

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7 p.

Creation Information

Morse, J.D.; Koo, J.C.; Graff, R.T.; Jankowski, A.F. & Hayes, J.P. March 30, 1998.

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Description

We have investigated field-emission devices for applications in sensors, diagnostics, and micro-electronics. Field-emission devices micromachined from silicon and molybdenum have been fabricated and tested. Experimental results have shown that the presence of nitrogen gas molecules for pressures up to 1 mtorr has only a moderate impact on device emission performance, and has no long term effect on device operation. These results demonstrate that field-emission cathodes can potentially be used in sensors applications where gas ionization by election impact is desirable, or other applications in which the field-emission device is exposed to less than ideal vacuum conditions.

Physical Description

7 p.

Notes

INIS; OSTI as DE98057440

Other: FDE: PDF; PL:

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  • Other Information: PBD: 30 Mar 1998

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  • Other: DE98057440
  • Report No.: UCRL-ID--130491
  • Grant Number: W-7405-ENG-48
  • DOI: 10.2172/305303 | External Link
  • Office of Scientific & Technical Information Report Number: 305303
  • Archival Resource Key: ark:/67531/metadc681117

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  • March 30, 1998

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  • July 25, 2015, 2:20 a.m.

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  • April 6, 2017, 6:03 p.m.

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Morse, J.D.; Koo, J.C.; Graff, R.T.; Jankowski, A.F. & Hayes, J.P. Field-emission cathode micro-electro-mechanical system technology for sensors, diagnostics, and microelectronics, report, March 30, 1998; California. (digital.library.unt.edu/ark:/67531/metadc681117/: accessed September 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.