MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

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Description

We have developed an interactive computer-aided design program that supports mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and supports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.

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5 p.

Creation Information

Allen, J. & Sacks, E. March 9, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We have developed an interactive computer-aided design program that supports mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and supports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.

Physical Description

5 p.

Notes

OSTI as DE00004257

Medium: P; Size: 5 pages

Source

  • International Conference on Modeling and Simulation of Microsystems, MSM'99, San Juan (PR), 04/19/1999--04/21/1999

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Identifier

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  • Report No.: SAND99-0006C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 4257
  • Archival Resource Key: ark:/67531/metadc680740

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • March 9, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • April 11, 2017, 12:42 p.m.

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Citations, Rights, Re-Use

Allen, J. & Sacks, E. MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis, article, March 9, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc680740/: accessed October 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.