Design and fabrication issues in the development of monolithic micro-optical systems

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The micro-sensor field is presently proliferating with various designs and approaches. The author have recently been involved with several mini/micro optical systems which have pointed out several trends in design and fabrication that are somewhat more important to these smaller optical systems. These include: material choices, alignment strategies, fabrication methods, and freedom and complexity of the optical designs. Their recent experience indicates that since mini/micro optical systems are likely to be produced in much higher number, that traditional fabrication methods could prove exorbitantly expensive. Deterministic fabrication methods employing inherently self-aligning features are well worth investigating. This is particularly true for ... continued below

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11 p.

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Rajic, S. & Egert, C.M. December 1, 1995.

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The micro-sensor field is presently proliferating with various designs and approaches. The author have recently been involved with several mini/micro optical systems which have pointed out several trends in design and fabrication that are somewhat more important to these smaller optical systems. These include: material choices, alignment strategies, fabrication methods, and freedom and complexity of the optical designs. Their recent experience indicates that since mini/micro optical systems are likely to be produced in much higher number, that traditional fabrication methods could prove exorbitantly expensive. Deterministic fabrication methods employing inherently self-aligning features are well worth investigating. This is particularly true for monolithic systems that fall into that grey area between mini and truly micro optical systems. This forum will allow the examination of three such recent systems with respect to design and fabrication.

Physical Description

11 p.

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OSTI as DE98000579

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  • Photonics West `96: conference on quantum well and superlattice physics VI, San Jose, CA (United States), 27 Jan - 2 Feb 1996

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  • Other: DE98000579
  • Report No.: ORNL/CP--94501
  • Report No.: CONF-960163--
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 292857
  • Archival Resource Key: ark:/67531/metadc680194

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • December 1, 1995

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  • July 25, 2015, 2:20 a.m.

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  • Jan. 21, 2016, 7:44 p.m.

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Rajic, S. & Egert, C.M. Design and fabrication issues in the development of monolithic micro-optical systems, article, December 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc680194/: accessed November 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.