Applications of dielectric barrier discharges

PDF Version Also Available for Download.

Description

Dielectric barrier discharges (DBDs) in oxygen and air are well established for the production of large quantities of ozone and are more recently being applied to a wider range of plasmachemical processes. As an introduction of this type of gas discharge, the main plasmaphysical features of sinusoidal-driven DBDs (transient, non-thermal plasmas at atmospheric pressure) will be described, and plasmachemical reaction pathways for the generation of ozone will be briefly discussed. The generation of atomic oxygen for ozone synthesis leads inevitably to the second application of DBDs, the non-thermal oxidation of volatile organic compounds (VOCs) in dry and humid air. Another ... continued below

Physical Description

22 p.

Creation Information

Falkenstein, Z. December 1, 1998.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Sponsor

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

Dielectric barrier discharges (DBDs) in oxygen and air are well established for the production of large quantities of ozone and are more recently being applied to a wider range of plasmachemical processes. As an introduction of this type of gas discharge, the main plasmaphysical features of sinusoidal-driven DBDs (transient, non-thermal plasmas at atmospheric pressure) will be described, and plasmachemical reaction pathways for the generation of ozone will be briefly discussed. The generation of atomic oxygen for ozone synthesis leads inevitably to the second application of DBDs, the non-thermal oxidation of volatile organic compounds (VOCs) in dry and humid air. Another application of DBDs is the generation of excited dimers and exiplexes for the production of incoherent (V)UV/visible light. The last and latest application of DBDs is the surface processing near atmospheric pressures. As an example, results of photoresist ashing on Si wafers in an oxygen plasma will be shown as function of gas pressure, gap spacing, and applied frequency. The surface of the etched photoresist is characterized by profilometry and scanning electron microscopy (SEM). The possibility of material deposition with DBDs will also be presented, where DBDs in acetylene lead to fast substrate deposition. Here, only the effects of the gas pressure and gap distance are explored.

Physical Description

22 p.

Notes

OSTI as DE99000625

Source

  • 12. internatinal conference on high power particle beams, Haifa (Israel), 8-12 Jun 1998

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Other: DE99000625
  • Report No.: LA-UR--98-1233
  • Report No.: CONF-980603--
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 291113
  • Archival Resource Key: ark:/67531/metadc679744

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • December 1, 1998

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • June 14, 2016, 5:26 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 4

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Falkenstein, Z. Applications of dielectric barrier discharges, article, December 1, 1998; New Mexico. (digital.library.unt.edu/ark:/67531/metadc679744/: accessed December 12, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.