Micro-grippers for assembly of LIGA parts Metadata

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  • Main Title Micro-grippers for assembly of LIGA parts


  • Author: Feddema, J.
    Creator Type: Personal
  • Author: Polosky, M.
    Creator Type: Personal
  • Author: Christenson, T.
    Creator Type: Personal
  • Author: Spletzer, B.
    Creator Type: Personal
  • Author: Simon, R.
    Creator Type: Personal


  • Sponsor: United States. Department of Energy. Office of Financial Management and Controller.
    Contributor Type: Organization
    Contributor Info: USDOE Office of Financial Management and Controller, Washington, DC (United States)


  • Name: Sandia National Laboratories
    Place of Publication: Albuquerque, New Mexico
    Additional Info: Sandia National Labs., Albuquerque, NM (United States)


  • Creation: 1997-12-31


  • English


  • Content Description: This paper describes ongoing testing of two microgrippers for assembly of LIGA (Lithographie Galvanoformung Abformung) parts. The goal is to place 100 micron outside diameter (OD) LIGA gears with a 50 micron inner diameter hole onto pins ranging from 35 to 49 microns. The first micro gripper is a vacuum gripper made of a 100 micron OD stainless steel tube. The second micro gripper is a set of tweezers fabricated using the LIGA process. Nickel, Permalloy, and copper materials are tested. The tweezers are actuated by a collet mechanism which is closed by a DC linear motor.
  • Physical Description: 10 p.


  • Keyword: Manipulators
  • Keyword: Actuators
  • Keyword: Robots
  • Keyword: Automation
  • Keyword: Miniaturization
  • Keyword: Manufacturing
  • Keyword: Nuclear Weapons
  • STI Subject Categories: 45 Military Technology, Weaponry, And National Defense


  • Conference: WAC `98: world automation congress, Anchorage, AK (United States), 10-14 May 1998


  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI


  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article


  • Text


  • Other: DE98001266
  • Report No.: SAND--97-2835C
  • Report No.: CONF-980514--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 292855
  • Archival Resource Key: ark:/67531/metadc679370


  • Display Note: OSTI as DE98001266