NIR high-efficiency subwavelength diffractive structures in semiconductors

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Description

We have fabricated sub-wavelength diffractive optical elements with binary phase profiles for operation at 975 nm. Blazed transmission gratings with minimum features 63 nm wide were designed by using rigorous coupled-wave analysis and fabricated by direct-write e-beam lithography and reactive ion beam etching in gallium arsenide. Transmission measurements show 85% diffraction efficiency into the first order. Anti-reflection surfaces, with features 42 nm wide were also designed and fabricated.

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7 p.

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Smith, R.E.; Warren, M.E.; Wendt, J.R. & Vawter, G.A. March 1, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We have fabricated sub-wavelength diffractive optical elements with binary phase profiles for operation at 975 nm. Blazed transmission gratings with minimum features 63 nm wide were designed by using rigorous coupled-wave analysis and fabricated by direct-write e-beam lithography and reactive ion beam etching in gallium arsenide. Transmission measurements show 85% diffraction efficiency into the first order. Anti-reflection surfaces, with features 42 nm wide were also designed and fabricated.

Physical Description

7 p.

Notes

OSTI as DE95008535

Source

  • SPIE `95: SPIE conference on optics, electro-optics, and laser application in science, engineering and medicine, San Jose, CA (United States), 5-14 Feb 1995

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  • Other: DE95008535
  • Report No.: SAND--95-0446C
  • Report No.: CONF-950226--28
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 34466
  • Archival Resource Key: ark:/67531/metadc679350

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Office of Scientific & Technical Information Technical Reports

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  • March 1, 1995

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • April 14, 2016, 7:56 p.m.

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Smith, R.E.; Warren, M.E.; Wendt, J.R. & Vawter, G.A. NIR high-efficiency subwavelength diffractive structures in semiconductors, article, March 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc679350/: accessed April 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.