Electronic sputtering and desorption effects in TOF-SIMS studies using slow highly charged ions like Au{sup 69+}

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Secondary ion yields from highly oriented pyrolytic graphite (HOPG) and SiO{sub 2} (native oxide on float zone silicon) targets at impact of slow (v {approx} 0.3 v{sub bohr}) highly charged ions have been measured by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). A direct comparison of collisional and electronic effects in secondary ion production using a beam of charge state equilibrated 300 keV Xe{sup 1+} shows a secondary ion yield increase with incident ion charge of {>=}100.

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6 p.

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Schenkel, T.; Briere, M.A.; Schmidt-Boecking, H.; Bethge, K. & Schneider, D. September 1, 1996.

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Secondary ion yields from highly oriented pyrolytic graphite (HOPG) and SiO{sub 2} (native oxide on float zone silicon) targets at impact of slow (v {approx} 0.3 v{sub bohr}) highly charged ions have been measured by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). A direct comparison of collisional and electronic effects in secondary ion production using a beam of charge state equilibrated 300 keV Xe{sup 1+} shows a secondary ion yield increase with incident ion charge of {>=}100.

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6 p.

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OSTI as DE97050166

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  • International symposium on materials science applications of ion beam techniques incorporating the 1. German-Australian workshop on ion beam analysis (IBT-1), Seeheim (Germany), 9-12 Sep 1996

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  • Other: DE97050166
  • Report No.: UCRL-JC--125358
  • Report No.: CONF-9609280--1
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 397157
  • Archival Resource Key: ark:/67531/metadc679173

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  • September 1, 1996

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  • July 25, 2015, 2:20 a.m.

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  • Feb. 16, 2016, 6:41 p.m.

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Schenkel, T.; Briere, M.A.; Schmidt-Boecking, H.; Bethge, K. & Schneider, D. Electronic sputtering and desorption effects in TOF-SIMS studies using slow highly charged ions like Au{sup 69+}, article, September 1, 1996; California. (digital.library.unt.edu/ark:/67531/metadc679173/: accessed December 11, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.