Gas sensing with acoustic devices

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Description

A survey is made of acoustic devices that are suitable as gas and vapor sensors. This survey focuses on attributes such as operating frequency, mass sensitivity, quality factor (Q), and their ability to be fabricated on a semiconductor substrate to allow integration with electronic circuitry. The treatment of the device surface with chemically-sensitive films to detect species of interest is discussed. Strategies for improving discrimination are described, including sensor arrays and species concentration and separation schemes. The advantages and disadvantages of integrating sensors with microelectronics are considered, along with the effect on sensitivity of scaling acoustic gas sensors to smaller ... continued below

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43 p.

Creation Information

Martin, S.J.; Frye, G.C.; Spates, J.J. & Butler, M.A. December 31, 1996.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A survey is made of acoustic devices that are suitable as gas and vapor sensors. This survey focuses on attributes such as operating frequency, mass sensitivity, quality factor (Q), and their ability to be fabricated on a semiconductor substrate to allow integration with electronic circuitry. The treatment of the device surface with chemically-sensitive films to detect species of interest is discussed. Strategies for improving discrimination are described, including sensor arrays and species concentration and separation schemes. The advantages and disadvantages of integrating sensors with microelectronics are considered, along with the effect on sensitivity of scaling acoustic gas sensors to smaller size.

Physical Description

43 p.

Notes

OSTI as DE97001889

Source

  • Ultrasonics symposium, San Antonio, TX (United States), 3-6 Nov 1996

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  • Other: DE97001889
  • Report No.: SAND--96-2937C
  • Report No.: CONF-9611113--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 434367
  • Archival Resource Key: ark:/67531/metadc679091

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • December 31, 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • April 14, 2016, 8:57 p.m.

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Martin, S.J.; Frye, G.C.; Spates, J.J. & Butler, M.A. Gas sensing with acoustic devices, article, December 31, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc679091/: accessed October 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.