Defect centers in chemical-mechanical polished MOS oxides

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Description

Defect centers generated in vacuum-ultraviolet irradiated chemical-mechanical polished oxides have been characterized using electron paramagnetic resonance and C-V analysis. Both oxide trap E{sub {gamma}} and interface trap P{sub b0} centers were detected in unpolished and polished oxides. In addition, another interface defect center known as the P{sub b1} center was only identified in the polished oxides, suggesting that the polishing process altered the SiO{sub 2}/Si interface.

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5 p.

Creation Information

Shaneyfelt, M.R.; Warren, W.L.; Hetherington, D.L.; Timon, R.P.; Resnick, P.J. & Winokur, P.S. December 31, 1994.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Defect centers generated in vacuum-ultraviolet irradiated chemical-mechanical polished oxides have been characterized using electron paramagnetic resonance and C-V analysis. Both oxide trap E{sub {gamma}} and interface trap P{sub b0} centers were detected in unpolished and polished oxides. In addition, another interface defect center known as the P{sub b1} center was only identified in the polished oxides, suggesting that the polishing process altered the SiO{sub 2}/Si interface.

Physical Description

5 p.

Notes

INIS; OSTI as DE95004777

Source

  • INFOS `95: insulating films on semiconductors conference, Grenoble (France), 7-10 Jun 1995

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  • Other: DE95004777
  • Report No.: SAND--94-2619C
  • Report No.: CONF-9506105--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 39684
  • Archival Resource Key: ark:/67531/metadc678723

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Office of Scientific & Technical Information Technical Reports

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  • December 31, 1994

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • April 13, 2016, 1:20 p.m.

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Shaneyfelt, M.R.; Warren, W.L.; Hetherington, D.L.; Timon, R.P.; Resnick, P.J. & Winokur, P.S. Defect centers in chemical-mechanical polished MOS oxides, article, December 31, 1994; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc678723/: accessed December 13, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.