Capacitance extraction from complex 3D interconnect structures

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Description

A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive unstructured grid capability, and a linear finite element algorithm. The capacitance is determined from the minimum in the total system energy as the nodes are varied to minimize the error in the electric field in the dielectric(s).

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4 p.

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Cartwright, D.; Csanak, G.; George, D.; Walker, R.; Kuprat, A.; Dengi, A. et al. June 1, 1999.

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Description

A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive unstructured grid capability, and a linear finite element algorithm. The capacitance is determined from the minimum in the total system energy as the nodes are varied to minimize the error in the electric field in the dielectric(s).

Physical Description

4 p.

Notes

OSTI as DE99002724

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  • MSM `99 conference, San Juan (Puerto Rico), 19-21 Apr 1999

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  • Other: DE99002724
  • Report No.: LA-UR--99-888
  • Report No.: CONF-990415--
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 350894
  • Archival Resource Key: ark:/67531/metadc678578

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • June 1, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • May 5, 2016, 6:22 p.m.

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Cartwright, D.; Csanak, G.; George, D.; Walker, R.; Kuprat, A.; Dengi, A. et al. Capacitance extraction from complex 3D interconnect structures, article, June 1, 1999; New Mexico. (digital.library.unt.edu/ark:/67531/metadc678578/: accessed July 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.