Origin of the Time-Dependence of Wet Oxidation of AlGaAs

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The time-dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} vs. its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate-limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction.

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5 p.

Creation Information

Allerman, A.A.; Ashby, C.I.H.; Bridges, M.M.; Hammons, B.E. & Hou, H.Q. February 15, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 25 times , with 4 in the last month . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The time-dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} vs. its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate-limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction.

Physical Description

5 p.

Notes

OSTI as DE00003596

Medium: P; Size: 5 pages

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  • Journal Name: Applied Physics Letters; Other Information: Submitted to Applied Physics Letters

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  • Report No.: SAND99-0390J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 3596
  • Archival Resource Key: ark:/67531/metadc678159

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  • February 15, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • April 11, 2017, 12:27 p.m.

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Allerman, A.A.; Ashby, C.I.H.; Bridges, M.M.; Hammons, B.E. & Hou, H.Q. Origin of the Time-Dependence of Wet Oxidation of AlGaAs, article, February 15, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc678159/: accessed September 26, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.