Understanding and Tailoring the Mechanical Properties of LIGA Fabricated Materials

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Description

LIGA fabricated materials and components exhibit several processing issues affecting their metallurgical and mechanical properties, potentially limiting their usefulness for MEMS applications. For example, LIGA processing by metal electrodeposition is very sensitive to deposition conditions which causes significant processing lot variations of mechanical and metallurgical properties. Furthermore, the process produces a material with a highly textured lenticular rnicrostructural morphology suggesting an anisotropic material response. Understanding and controlling out-of-plane anisotropy is desirable for LIGA components designed for out-of-plane flexures. Previous work by the current authors focused on results from a miniature servo-hydraulic mechanical test frame constructed for characterizing LIGA materials. Those ... continued below

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Buchheit, T.E.; Christenson, T.R.; Lavan, D.A. & Schmale, D.T. January 25, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Laboratories, Albuquerque, NM, and Livermore, CA
    Place of Publication: Albuquerque, New Mexico

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Description

LIGA fabricated materials and components exhibit several processing issues affecting their metallurgical and mechanical properties, potentially limiting their usefulness for MEMS applications. For example, LIGA processing by metal electrodeposition is very sensitive to deposition conditions which causes significant processing lot variations of mechanical and metallurgical properties. Furthermore, the process produces a material with a highly textured lenticular rnicrostructural morphology suggesting an anisotropic material response. Understanding and controlling out-of-plane anisotropy is desirable for LIGA components designed for out-of-plane flexures. Previous work by the current authors focused on results from a miniature servo-hydraulic mechanical test frame constructed for characterizing LIGA materials. Those results demonstrated microstructural and mechanical properties dependencies with plating bath current density in LIGA fabricated nickel (LIGA Ni). This presentation builds on that work and fosters a methodology for controlling the properties of LIGA fabricated materials through processing. New results include measurement of mechanical properties of LIGA fabricated copper (LIGA Cu), out-of-plane and localized mechanical property measurements using compression testing and nanoindentation of LIGA Ni and LIGA Cu.

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Source

  • Materials Research Society/Material Science of Microelectromechanical System Devices; Boston, MA; 11/30-12/04/1998

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  • Other: DE00003294
  • Report No.: SAND99-0221C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 3294
  • Archival Resource Key: ark:/67531/metadc677590

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • January 25, 1999

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • Dec. 9, 2016, 7:33 p.m.

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Buchheit, T.E.; Christenson, T.R.; Lavan, D.A. & Schmale, D.T. Understanding and Tailoring the Mechanical Properties of LIGA Fabricated Materials, article, January 25, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc677590/: accessed April 26, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.