Reticle blanks for extreme ultraviolet lithography: Ion beam sputter deposition of low defect density Mo/Si multilayers

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Description

We report on growth of low defect density Mo/Si multilayer (ML) coatings. The coatings were grown in a deposition system designed for EUVL reticle blank fabrication. Complete, 81 layer, high reflectance Mo/Si ML coatings were deposited on 150 mm dia (100) oriented Si wafer substrates using ion beam sputter deposition. Added defects, measured by optical scattering, correspond to defect densities of 2x10{sup -2}/cm{sup 2}. This represents a reduction in defect density of Mo/Si ML coatings by a factor of 10{sup 5}.

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7 p.

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Vernon, S.P.; Kania, D.R.; Kearney, P.A.; Levesque, R.A.; Hayes, A.V.; Druz, B. et al. June 24, 1996.

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Description

We report on growth of low defect density Mo/Si multilayer (ML) coatings. The coatings were grown in a deposition system designed for EUVL reticle blank fabrication. Complete, 81 layer, high reflectance Mo/Si ML coatings were deposited on 150 mm dia (100) oriented Si wafer substrates using ion beam sputter deposition. Added defects, measured by optical scattering, correspond to defect densities of 2x10{sup -2}/cm{sup 2}. This represents a reduction in defect density of Mo/Si ML coatings by a factor of 10{sup 5}.

Physical Description

7 p.

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OSTI as DE96014135

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  • Optical Society of America meeting on extreme ultraviolet lithography, Boston, MA (United States), 29 Apr - 3 May 1996

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  • Other: DE96014135
  • Report No.: UCRL-JC--123009
  • Report No.: CONF-9604150--3
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 378644
  • Archival Resource Key: ark:/67531/metadc676757

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  • June 24, 1996

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  • July 25, 2015, 2:20 a.m.

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  • Feb. 17, 2016, 4 p.m.

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Vernon, S.P.; Kania, D.R.; Kearney, P.A.; Levesque, R.A.; Hayes, A.V.; Druz, B. et al. Reticle blanks for extreme ultraviolet lithography: Ion beam sputter deposition of low defect density Mo/Si multilayers, article, June 24, 1996; California. (digital.library.unt.edu/ark:/67531/metadc676757/: accessed September 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.