Progress towards a 20 kV, 2 kA plasma source ion implantation modulator for automotive production of diamond film on aluminum

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This paper provides the process requirements and the electrical design topology being developed to facilitate large scale production of amorphous diamond films on aluminum. The patented recipe, that includes other surface modification processes, requires various operational voltages, duty cycles, and current load regimes to ensure a high quality film. It is desirable to utilize a common modulator design for this relatively low voltage recipe. Processing may include target part cleaning, ion implantation, plasma deposition, and vacuum chamber cleaning. Modulator performance will have a direct impact on plant size and system economics. Unfortunately, process requirements are in a regime that is ... continued below

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5 p.

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Reass, W.A.; Munson, C.A.; Malaczynski, G. & Elmoursi, A. November 1, 1996.

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Description

This paper provides the process requirements and the electrical design topology being developed to facilitate large scale production of amorphous diamond films on aluminum. The patented recipe, that includes other surface modification processes, requires various operational voltages, duty cycles, and current load regimes to ensure a high quality film. It is desirable to utilize a common modulator design for this relatively low voltage recipe. Processing may include target part cleaning, ion implantation, plasma deposition, and vacuum chamber cleaning. Modulator performance will have a direct impact on plant size and system economics. Unfortunately, process requirements are in a regime that is not easily achievable by solid state or very efficiently by vacuum tube devices. To accommodate the various process requirements, the authors are developing a modulator based on series connected hot decks utilizing high current, high voltage IGBT devices.

Physical Description

5 p.

Notes

OSTI as DE97000350

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  • 22. International power modulator symposium, Boca Raton, FL (United States), 24-27 Jun 1996

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  • Other: DE97000350
  • Report No.: LA-UR--96-3355
  • Report No.: CONF-960685--9
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 392831
  • Archival Resource Key: ark:/67531/metadc676681

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  • November 1, 1996

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  • July 25, 2015, 2:20 a.m.

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  • Feb. 26, 2016, 3:34 p.m.

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Reass, W.A.; Munson, C.A.; Malaczynski, G. & Elmoursi, A. Progress towards a 20 kV, 2 kA plasma source ion implantation modulator for automotive production of diamond film on aluminum, article, November 1, 1996; New Mexico. (digital.library.unt.edu/ark:/67531/metadc676681/: accessed October 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.