Parameter optimization of a microfabricated surface acoustic wave sensor for inert gas detection

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This work is related to designing, fabricating, and testing a surface acoustic wave sensor to be used for detecting metastable inert gases, particularly helium. The assembly consists of two microsensor configurations: (a) a reference device with no deposition at the delay line and (b) a sensing device with an Au-activated TiO{sub 2} e-beam-deposited thin film on the delay line. The interdigitated transducers and delay lines are fabricated by photolithography techniques on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the acoustic waves. Variation in electrical conductivity of the Au-activated TiO{sub 2} film due to exposure to metastable He ... continued below

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8 p.

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Ahuja, S.; Ross, C.; Chien, H.T. & Raptis, A.C. December 31, 1996.

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Description

This work is related to designing, fabricating, and testing a surface acoustic wave sensor to be used for detecting metastable inert gases, particularly helium. The assembly consists of two microsensor configurations: (a) a reference device with no deposition at the delay line and (b) a sensing device with an Au-activated TiO{sub 2} e-beam-deposited thin film on the delay line. The interdigitated transducers and delay lines are fabricated by photolithography techniques on a single Y-cut LiNbO{sub 3} substrate oriented for Z-propagation of the acoustic waves. Variation in electrical conductivity of the Au-activated TiO{sub 2} film due to exposure to metastable He is translated as a frequency change in the assembly. Various characteristics of the surface acoustic microsensor have been studied to better understand and optimize the variation of acoustic wave velocity and the operating frequency of the microdevice. Methods for the TiO{sub 2} thin-film deposition are discussed.

Physical Description

8 p.

Notes

INIS; OSTI as DE97004702

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  • 1996 Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 2-6 Dec 1996

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  • Other: DE97004702
  • Report No.: ANL/ET/CP--91737
  • Report No.: CONF-961202--105
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 477770
  • Archival Resource Key: ark:/67531/metadc676062

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  • December 31, 1996

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  • July 25, 2015, 2:21 a.m.

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  • Sept. 1, 2016, 1:32 p.m.

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Ahuja, S.; Ross, C.; Chien, H.T. & Raptis, A.C. Parameter optimization of a microfabricated surface acoustic wave sensor for inert gas detection, article, December 31, 1996; Illinois. (digital.library.unt.edu/ark:/67531/metadc676062/: accessed July 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.