Image degradation from surface scatter in EUV optics

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Description

Synchrotron-based 13 nm measurements of scatter from individual mirrors and an assembled imaging system for Extreme Ultraviolet Lithography have been compared to a model of image formation in the presence of scatter. The theory uses a Power Spectral Density description of the constituent optics to describe modifications to the image due to scatter. Reasonable agreement between measurements and theory was obtained for both individual mirrors and the assembled system. 9 refs., 4 figs.

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6 p.

Creation Information

Gaines, D.P.; Daly, T.P.; Stearns, D.G.; LaFontaine, B.; Sweeney, D.W. & Fuchs, D. May 28, 1996.

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Description

Synchrotron-based 13 nm measurements of scatter from individual mirrors and an assembled imaging system for Extreme Ultraviolet Lithography have been compared to a model of image formation in the presence of scatter. The theory uses a Power Spectral Density description of the constituent optics to describe modifications to the image due to scatter. Reasonable agreement between measurements and theory was obtained for both individual mirrors and the assembled system. 9 refs., 4 figs.

Physical Description

6 p.

Notes

OSTI as DE96013665

Source

  • Optical Society of America (OSA) meeting on integrated photonics research, Boston, MA (United States), 29 Apr - 3 May 1996

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  • Other: DE96013665
  • Report No.: UCRL-JC--123007
  • Report No.: CONF-960493--18
  • Grant Number: W-7405-ENG-48
  • DOI: 10.2172/378183 | External Link
  • Office of Scientific & Technical Information Report Number: 378183
  • Archival Resource Key: ark:/67531/metadc675936

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • May 28, 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

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  • Feb. 16, 2016, 7:48 p.m.

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Gaines, D.P.; Daly, T.P.; Stearns, D.G.; LaFontaine, B.; Sweeney, D.W. & Fuchs, D. Image degradation from surface scatter in EUV optics, report, May 28, 1996; California. (digital.library.unt.edu/ark:/67531/metadc675936/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.