Performance tradeoffs for a surface micromachined microengine

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Description

An electromechanical model of Sandia`s microengine is developed and applied to quantify critical performance tradeoffs. This is done by determining how forces impact the mechanical response of the engine to different electrical drive signals. To validate the theoretical results, model-based drive signals are used to operate actual engines, where controlled operation is achieved for the following cases: (1) spring forces are dominant, (2) frictional forces are dominant, (3) linear inertial forces are dominant, (4) viscous damping forces are dominant, and (5) inertial load forces are dominant. Significant improvements in engine performance are experimentally demonstrated in the following areas: positional control, ... continued below

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11 p.

Creation Information

Miller, S.L.; Sniegowski, J.J.; LaVigne, G. & McWhorter, P.J. October 1, 1996.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

An electromechanical model of Sandia`s microengine is developed and applied to quantify critical performance tradeoffs. This is done by determining how forces impact the mechanical response of the engine to different electrical drive signals. To validate the theoretical results, model-based drive signals are used to operate actual engines, where controlled operation is achieved for the following cases: (1) spring forces are dominant, (2) frictional forces are dominant, (3) linear inertial forces are dominant, (4) viscous damping forces are dominant, and (5) inertial load forces are dominant. Significant improvements in engine performance are experimentally demonstrated in the following areas: positional control, start/stop endurance, constant speed endurance, friction load reduction, and rapid actuation of inertial loads.

Physical Description

11 p.

Notes

OSTI as DE96014844

Source

  • SPIE conference on micromachining and microfabrication, Austin, TX (United States), 14-15 Oct 1996

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  • Other: DE96014844
  • Report No.: SAND--96-1958C
  • Report No.: CONF-961086--5
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 378812
  • Archival Resource Key: ark:/67531/metadc674539

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • October 1, 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • April 13, 2016, 4:15 p.m.

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Miller, S.L.; Sniegowski, J.J.; LaVigne, G. & McWhorter, P.J. Performance tradeoffs for a surface micromachined microengine, article, October 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc674539/: accessed November 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.