Monte Carlo simulations of ion-enhanced island coarsening

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Description

Monte Carlo simulations of growth and ion bombardment have been performed to explore the atomistic processes that occur during ion-assisted growth. The primary elements of the simulation are (1) creation of surface defects (vacancies and adatoms) by ion bombardment and deposition, (2) thermally activated motion of surface defects and (3) recombination of surface vacancies and adatoms. The authors find that a balance of ion bombardment and deposition (where the creation rate of adatom defects is equal to that of surface vacancies) leads to larger islands and more rapid island coarsening than thermal coarsening with no flux of defects. The presence ... continued below

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11 p.

Creation Information

Chason, E. & Kellerman, B.K. August 21, 1996.

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Authors

  • Chason, E. Sandia National Labs., Albuquerque, NM (United States)
  • Kellerman, B.K. MEMC Electronic Materials, St. Peters, MO (United States)

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Monte Carlo simulations of growth and ion bombardment have been performed to explore the atomistic processes that occur during ion-assisted growth. The primary elements of the simulation are (1) creation of surface defects (vacancies and adatoms) by ion bombardment and deposition, (2) thermally activated motion of surface defects and (3) recombination of surface vacancies and adatoms. The authors find that a balance of ion bombardment and deposition (where the creation rate of adatom defects is equal to that of surface vacancies) leads to larger islands and more rapid island coarsening than thermal coarsening with no flux of defects. The presence of the defect flux enhances the breakup of clusters, leading to a broad distribution of island sizes. In comparison, the thermal coarsening leads to a more uniform distribution of islands sizes that increases in size much more slowly. Histograms of the evolution of the island size distribution provide a quantitative measure of the ion-induced increase in the rate of coarsening.

Physical Description

11 p.

Notes

INIS; OSTI as DE96014500

Source

  • IBMM `96: 10. international conference on ion beam modification of materials, Albuquerque, NM (United States), 1-6 Sep 1996

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  • Other: DE96014500
  • Report No.: SAND--96-0893C
  • Report No.: CONF-960994--5
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/378876 | External Link
  • Office of Scientific & Technical Information Report Number: 378876
  • Archival Resource Key: ark:/67531/metadc674474

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • August 21, 1996

Added to The UNT Digital Library

  • July 25, 2015, 2:20 a.m.

Description Last Updated

  • April 13, 2016, 3:07 p.m.

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Chason, E. & Kellerman, B.K. Monte Carlo simulations of ion-enhanced island coarsening, report, August 21, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc674474/: accessed December 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.