Fabrication and Characterization of PZT Thin-Film on Bulk Micromachined Si Motion Detectors

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Motion detectors consisting of Pb(Zr{sub x}Ti{sub (1{minus}x)})O{sub 3} (PZT) thin films, between platinum electrodes, on micromachined silicon compound clamped-clamped or cantilever beam structures were fabricated using either hot KOH or High Aspect Ratio Silicon Etching (HARSE) to micromachine the silicon. The beams were designed such that a thicker region served as a test mass that produced stress at the top of the membrane springs that supported it when the object to which the detector was mounted moved. The PZT film devices were placed on these membranes to generate a charge or a voltage in response to the stress through the ... continued below

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8 p.

Creation Information

Clem, P.; Garino, T.J.; Laguna, G. & Tuttle, B.A. January 7, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Motion detectors consisting of Pb(Zr{sub x}Ti{sub (1{minus}x)})O{sub 3} (PZT) thin films, between platinum electrodes, on micromachined silicon compound clamped-clamped or cantilever beam structures were fabricated using either hot KOH or High Aspect Ratio Silicon Etching (HARSE) to micromachine the silicon. The beams were designed such that a thicker region served as a test mass that produced stress at the top of the membrane springs that supported it when the object to which the detector was mounted moved. The PZT film devices were placed on these membranes to generate a charge or a voltage in response to the stress through the piezoelectric effect. Issues of integration of the PZT device fabrication process with the two etching processes are discussed. The effects of PZT composition and device geometry on the response of the detectors to motion is reported and discussed.

Physical Description

8 p.

Notes

OSTI as DE00003247

Medium: P; Size: 8 pages

Source

  • 1998 Fall Materials Research Society Meeting, Boston, MA (US), 11/29/1998--12/04/1998

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  • Report No.: SAND99-0031C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 3247
  • Archival Resource Key: ark:/67531/metadc674228

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  • January 7, 1999

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  • July 25, 2015, 2:20 a.m.

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  • April 11, 2017, 6:37 p.m.

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Clem, P.; Garino, T.J.; Laguna, G. & Tuttle, B.A. Fabrication and Characterization of PZT Thin-Film on Bulk Micromachined Si Motion Detectors, article, January 7, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc674228/: accessed September 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.