Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering

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Description

This work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25 {micro}m diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26-28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.

Physical Description

7 p.

Creation Information

Adams, D.P.; Benavides, G.L. & Vasile, M.J. December 22, 1998.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 65 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This work combines focused ion beam sputtering and ultra-precision machining for microfabrication of metal alloys and polymers. Specifically, micro-end mills are made by Ga ion beam sputtering of a cylindrical tool shank. Using an ion energy of 20keV, the focused beam defines the tool cutting edges that have submicrometer radii of curvature. We demonstrate 25 {micro}m diameter micromilling tools having 2, 4 and 5 cutting edges. These tools fabricate fine channels, 26-28 microns wide, in 6061 aluminum, brass, and polymethyl methacrylate. Micro-tools are structurally robust and operate for more than 5 hours without fracture.

Physical Description

7 p.

Notes

OSTI as DE00002819

Medium: P; Size: 7 pages

Source

  • Materials Research Society Fall Meeting, Boston, MA (US), 11/30/1998--12/04/1998

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  • Report No.: SAND98-2843C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 2819
  • Archival Resource Key: ark:/67531/metadc673350

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • December 22, 1998

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 11, 2017, 3:34 p.m.

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Adams, D.P.; Benavides, G.L. & Vasile, M.J. Micrometer-Scale Machining of Metals and Polymers Enabled by Focused Ion Beam Sputtering, article, December 22, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc673350/: accessed September 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.