Maglev six degree-of-freedom fine position stage control system

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Description

A wafer positioning system was recently developed by Sandia National Laboratories for an Extreme Ultraviolet Lithography (EUVL). The system, which utilizes a magnetically levitated fine stage to provide ultra-precise positioning in all six degrees of freedom, incorporates technological improvements resulting from four years of prototype development experience. System enhancements, implemented on a second generation design for a National Center for Advanced Information Component Manufacturing (NCAICM) Structural Control Testbed, define the present level of research. This paper describes the design, implementation, and functional capability of the systems. Specifics regarding control system electronics, including software and control algorithm structure, as well as ... continued below

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9 p.

Creation Information

Wronosky, J.B.; Smith, T.G.; Darnold, J.R. & Jordan, J.D. December 31, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A wafer positioning system was recently developed by Sandia National Laboratories for an Extreme Ultraviolet Lithography (EUVL). The system, which utilizes a magnetically levitated fine stage to provide ultra-precise positioning in all six degrees of freedom, incorporates technological improvements resulting from four years of prototype development experience. System enhancements, implemented on a second generation design for a National Center for Advanced Information Component Manufacturing (NCAICM) Structural Control Testbed, define the present level of research. This paper describes the design, implementation, and functional capability of the systems. Specifics regarding control system electronics, including software and control algorithm structure, as well as performance design goals and test results are presented.

Physical Description

9 p.

Notes

OSTI as DE96006466

Source

  • 1996 signal processing applications conference and exhitition at DSP{sup x}, San Jose, CA (United States), 11-14 Mar 1996

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  • Other: DE96006466
  • Report No.: SAND--95-2458C
  • Report No.: CONF-9603133--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 215316
  • Archival Resource Key: ark:/67531/metadc672818

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • December 31, 1995

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

Description Last Updated

  • June 23, 2016, 12:26 p.m.

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Wronosky, J.B.; Smith, T.G.; Darnold, J.R. & Jordan, J.D. Maglev six degree-of-freedom fine position stage control system, article, December 31, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc672818/: accessed October 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.