Nanoindentation of soft films on hard substrates: The importance of pile-up

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Nanoindentation is used for measuring mechanical properties of thin films. This paper addresses potential measurement errors caused by pile-up when soft films deposited on hard substrates are tested this way. Pile-up is exacerbated in soft film/hard substrate systems because of the constraint the substrate exerts on plastic deformation of the film. To examine pile-up effects, Al films 240 and 1700 nm thick were deposited on hard glass and tested by standard nanoindentation. In Al/glass, the film and substrate have similar elastic moduli; thus, any unusual behavior in nanoindentation results may be attributed to differences in plastic flow alone. SEM examination ... continued below

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6 p.

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Tsui, T.Y.; Pharr, G.M. & Oliver, W.C. May 1, 1996.

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Description

Nanoindentation is used for measuring mechanical properties of thin films. This paper addresses potential measurement errors caused by pile-up when soft films deposited on hard substrates are tested this way. Pile-up is exacerbated in soft film/hard substrate systems because of the constraint the substrate exerts on plastic deformation of the film. To examine pile-up effects, Al films 240 and 1700 nm thick were deposited on hard glass and tested by standard nanoindentation. In Al/glass, the film and substrate have similar elastic moduli; thus, any unusual behavior in nanoindentation results may be attributed to differences in plastic flow alone. SEM examination of nanoindentation hardness impressions in the film revealed that common methods for analyzing nanoindentation data underestimate the true contact areas by as much as 80%, which results in overestimations of the hardness and modulus by as much as 80 and 35%, respectively. Sources of these errors and their effect on measurement of hardness and elastic modulus are discussed, and a simple model for the composite hardness of the film/substrate system is developed. This model could prove useful when it is not possible to make indentations shallow enough to avoid substrate effects.

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6 p.

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OSTI as DE96009401

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996

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  • Other: DE96009401
  • Report No.: CONF-960401--19
  • Grant Number: AC05-96OR22464;AC05-76OR00033
  • Office of Scientific & Technical Information Report Number: 224850
  • Archival Resource Key: ark:/67531/metadc672590

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • May 1, 1996

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  • June 29, 2015, 9:42 p.m.

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  • May 2, 2016, 4:28 p.m.

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Tsui, T.Y.; Pharr, G.M. & Oliver, W.C. Nanoindentation of soft films on hard substrates: The importance of pile-up, article, May 1, 1996; Tennessee. (digital.library.unt.edu/ark:/67531/metadc672590/: accessed December 14, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.