Ring-field EUVL camera with large Etendu

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A ``debris-less`` laser-plasma source (LPS) of extreme-UV radiation has been developed by Kubiak, et al. This is a huge step forward for the extreme-UV lithography program (EUVL) because it will extend the life of the collecting mirrors that face the source. This source has a 300-{mu}m diameter (D source) which is larger than the earlier, {approximately}75-{mu}m diameter plasma balls created on metal targets. The larger source size requires that the Etendu of the system must also be larger if the source radiation is to be used efficiently. A family of 4-mirror, scanning, ring-field lithography cameras has been designed that can ... continued below

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5 p.

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Sweatt, W.C. December 31, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A ``debris-less`` laser-plasma source (LPS) of extreme-UV radiation has been developed by Kubiak, et al. This is a huge step forward for the extreme-UV lithography program (EUVL) because it will extend the life of the collecting mirrors that face the source. This source has a 300-{mu}m diameter (D source) which is larger than the earlier, {approximately}75-{mu}m diameter plasma balls created on metal targets. The larger source size requires that the Etendu of the system must also be larger if the source radiation is to be used efficiently. A family of 4-mirror, scanning, ring-field lithography cameras has been designed that can be efficiently coupled to a ``debris-less`` LPS. The most promising design has a 0.085-numerical aperture (NA{sub camera}) for printing {approx} 100-nm features. At the image plane it has 13 nm of distortion and a 98% Strehl ratio across its 7-mm wide ring-field ({Delta}r).

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5 p.

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OSTI as DE96004677

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  • Optical Society of America topical meeting on diffractive optics and micro optics, Boston, MA (United States), 29 Apr - 1 May 1996

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  • Other: DE96004677
  • Report No.: SAND--95-2936C
  • Report No.: CONF-960465--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 202424
  • Archival Resource Key: ark:/67531/metadc672430

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • December 31, 1995

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 14, 2016, 12:24 p.m.

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Sweatt, W.C. Ring-field EUVL camera with large Etendu, article, December 31, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc672430/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.