Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition

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A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under pulsed laser deposition conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic carbon plasma containing larger amounts of luminescent C{sub 2} compared with ArF-laser ablation at the same energy fluence. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited ... continued below

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15 p.

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Puretzky, A.A.; Geohegan, D.B.; Jellison, G.E. Jr. & McGibbon, M.M. May 1, 1995.

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A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under pulsed laser deposition conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic carbon plasma containing larger amounts of luminescent C{sub 2} compared with ArF-laser ablation at the same energy fluence. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp{sup 3} bonded carbon for 7 J/cm{sup 2}-ArF-laser DLC film). The more energetic and highly-atomized ArF-laser carbon plasma appears to be responsible for the better diamond-like properties.

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15 p.

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OSTI as DE96005741

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  • 3. international conference on laser ablation (COLA `95), Strasbourg (France), 22-26 May 1995

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  • Other: DE96005741
  • Report No.: CONF-9505219--3
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 195652
  • Archival Resource Key: ark:/67531/metadc671588

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  • May 1, 1995

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  • June 29, 2015, 9:42 p.m.

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  • Jan. 21, 2016, 6:49 p.m.

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Puretzky, A.A.; Geohegan, D.B.; Jellison, G.E. Jr. & McGibbon, M.M. Comparative diagnostics of ArF- and KrF-laser generated carbon plumes used for amorphous diamond-like carbon film deposition, article, May 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc671588/: accessed September 25, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.