Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae Page: 4 of 69
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1. Introduction 4
2. Basic Foundations of the Plasma Model 6
3. The Four Regions of the Plasma 11
3.1 The Ambipolar Diffusion Region I of the Bulk Plasma 11
3.2 Neutral Region II and the Pre-sheath Region IIA 12
3.3 The Transition Region III 14
3.4 The Child-Langmuir Region IV 15
4.0 the Connection Algorithms 17
4.1 Connection of I and II 17
4.2 Connection of II and III 17
4.3 Discussion of the Connected Solutions 22
4.3.1 Summary of Regional Decomposition 22
4.3.2 Boundary Conditions for Ambipolar Region I 23
4.3.3 The Fully Connected QSS Result 24
5. Time-Dependent Ion Motion in the Sheath 27
6. Circuit Description Including Sheath Model, Examples 31
6.1 Case of an Isolated Sheath with Applied rf bias 33
6.2 Testing of Sheath Model where E0 is Zero 34
6.3 Testing of Sheath Model with Nonzero E0 35
7. Conclusion 36
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Riley, M.E. Unified model of the rf plasma sheath: Part 2, Asymptotic connection formulae, report, August 1, 1996; Albuquerque, New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc671547/m1/4/: accessed March 19, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.