Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

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Description

The integration of optical components with polysilicon surface micromechanical actuation mechanisms show significant promise for signal switching, fiber alignment, and optical sensing applications. Monolithically integrating the manufacturing process for waveguide structures with the processing of polysilicon actuators allows actuated waveguides to take advantage of the economy of silicon manufacturing. The optical and stress properties of the oxides and nitrides considered for the waveguide design along with design, fabrication, and testing details for the polysilicon actuators are presented.

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7 p.

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Smith, J.H.; Carson, R.F.; Sullivan, C.T. & McClellan, G. March 1, 1996.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The integration of optical components with polysilicon surface micromechanical actuation mechanisms show significant promise for signal switching, fiber alignment, and optical sensing applications. Monolithically integrating the manufacturing process for waveguide structures with the processing of polysilicon actuators allows actuated waveguides to take advantage of the economy of silicon manufacturing. The optical and stress properties of the oxides and nitrides considered for the waveguide design along with design, fabrication, and testing details for the polysilicon actuators are presented.

Physical Description

7 p.

Notes

OSTI as DE96006476

Source

  • Society of Photo-Optical Instrumentation Engineers (SPIE) smart structures and materials conference, San Diego, CA (United States), 26-29 Feb 1996

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  • Other: DE96006476
  • Report No.: SAND--96-0398C
  • Report No.: CONF-960268--8
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 230601
  • Archival Resource Key: ark:/67531/metadc671256

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • March 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 13, 2016, 3:06 p.m.

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Smith, J.H.; Carson, R.F.; Sullivan, C.T. & McClellan, G. Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators, article, March 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc671256/: accessed October 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.