Nanoparticle synthesis in pulsed low temperature discharges

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Silicon nitride powders with an average size as low as 7 nm are synthesized in a pulsed radio frequency glow discharge. The as-synthesized silicon nitride powder from a silane/ammonia plasma has a high hydrogen content and is sensitive to oxidation in air. Post-plasma heating of the powder in a vacuum results in nitrogen loss, giving silicon-rich powder. In contrast, heat treatment at 800 C for 20 minutes in an ammonia atmosphere (200 Torr pressure) yields a hydrogen-free powder which is stable with respect to atmospheric oxidation. Several approaches to synthesizing silicon carbide nano-size powders are presented. Experiments using silane/hydrocarbon plasmas ... continued below

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10 p.

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Buss, R.J. June 1, 1996.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Silicon nitride powders with an average size as low as 7 nm are synthesized in a pulsed radio frequency glow discharge. The as-synthesized silicon nitride powder from a silane/ammonia plasma has a high hydrogen content and is sensitive to oxidation in air. Post-plasma heating of the powder in a vacuum results in nitrogen loss, giving silicon-rich powder. In contrast, heat treatment at 800 C for 20 minutes in an ammonia atmosphere (200 Torr pressure) yields a hydrogen-free powder which is stable with respect to atmospheric oxidation. Several approaches to synthesizing silicon carbide nano-size powders are presented. Experiments using silane/hydrocarbon plasmas produce particles with a high hydrogen content as demonstrated by Fourier transform infrared analysis. The hydrogen is present as both CH and SiH functionality. These powders are extremely air-sensitive. A second approach uses a gas mixture of methyltrichlorosilane and hydrogen. The particles have a low hydrogen content and resist oxidation. Particle morphology of the silicon carbide is more spherical and there is less agglomeration than is observed in the silicon nitride powder.

Physical Description

10 p.

Notes

OSTI as DE96010537

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  • 10. annual conference on fossil energy materials, Knoxville, TN (United States), 14-16 May 1996

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  • Other: DE96010537
  • Report No.: SAND--96-1235C
  • Report No.: CONF-9605167--3
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/244621 | External Link
  • Office of Scientific & Technical Information Report Number: 244621
  • Archival Resource Key: ark:/67531/metadc671118

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • June 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 14, 2016, 5:52 p.m.

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Buss, R.J. Nanoparticle synthesis in pulsed low temperature discharges, report, June 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc671118/: accessed November 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.