Quartz Channel Fabrication for Electrokinetically Driven Separations

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For well resolved electrokinetic separation, we L tilize crystalline quartz to micromachine a uniformly packe Q&iKLmnel. Packing features are posts 5 Vm on a side with:} pm spacing and etched 42 Vm deep. In addition to anisotropic wet etch characteristics for micromachining, quartz propmties are compatible with chemical soiutioits, ekctrokinetic high voltage operation, and stationary phase film depositions. To seal these channels, we employ a room temperature silicon-oxynhride deposition to forma membrane, that is subsequently coated for mechanical stability. Using this technique, particulate issues and global warp, that make large area wafer bon ding methods difficult, are avoided, and a ... continued below

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Arnold, D.W.; Ashby, C.I.H.; Bailey, C.G.; Kravitz, S.H., Warren, M.E. & Matzke, C.M. December 1, 1998.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Laboratories, Albuquerque, NM, and Livermore, CA
    Place of Publication: Albuquerque, New Mexico

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Description

For well resolved electrokinetic separation, we L tilize crystalline quartz to micromachine a uniformly packe Q&iKLmnel. Packing features are posts 5 Vm on a side with:} pm spacing and etched 42 Vm deep. In addition to anisotropic wet etch characteristics for micromachining, quartz propmties are compatible with chemical soiutioits, ekctrokinetic high voltage operation, and stationary phase film depositions. To seal these channels, we employ a room temperature silicon-oxynhride deposition to forma membrane, that is subsequently coated for mechanical stability. Using this technique, particulate issues and global warp, that make large area wafer bon ding methods difficult, are avoided, and a room temperature process, in contrast to high temperature bonding techniques, accommodate preprocessing of metal films for electrical interconnect. After sealing channels, a number of macro-assembly steps are required to attach a micro-optical detection system and fluid interconnects. Keywords: microcharmel, integrated channel, micromachined channel, packed channel, electrokinetic channel, eleetrophoretic channel

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  • SPIE's 1998 Symposium on Micromachining and Microfabrication; Santa Clara, CA; 09/20-22/1998

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  • Other: DE00002058
  • Report No.: SAND98-2691C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 2058
  • Archival Resource Key: ark:/67531/metadc670790

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  • December 1, 1998

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  • June 29, 2015, 9:42 p.m.

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  • Dec. 7, 2016, 8:05 p.m.

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Arnold, D.W.; Ashby, C.I.H.; Bailey, C.G.; Kravitz, S.H., Warren, M.E. & Matzke, C.M. Quartz Channel Fabrication for Electrokinetically Driven Separations, article, December 1, 1998; Albuquerque, New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc670790/: accessed May 23, 2019), University of North Texas Libraries, Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.