In situ x-ray scattering study of incipient formation of porous silicon

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The incipient formation of porous silicon at the solution/silicon interface was examined in situ using synchrotron x-ray scattering techniques. The measurements were performed in a transmission x-ray/electrochemistry cell with p{sup +} type silicon single crystals. The structure of pores near the interface is determined from x-ray reflectivity and diffuse-scattering measurements. We found an interfacial layer with tapered cylindrical pores, followed by a layer of uniform porosity with increased branching with depth. For our conditions, the porosity was around 50%, and the pore diameter was about 50 to 70 {Angstrom}.

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11 p.

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You, Hoydoo; Huang, Kegang; Yoo, S. S. & Nagy, Z. December 1995.

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Description

The incipient formation of porous silicon at the solution/silicon interface was examined in situ using synchrotron x-ray scattering techniques. The measurements were performed in a transmission x-ray/electrochemistry cell with p{sup +} type silicon single crystals. The structure of pores near the interface is determined from x-ray reflectivity and diffuse-scattering measurements. We found an interfacial layer with tapered cylindrical pores, followed by a layer of uniform porosity with increased branching with depth. For our conditions, the porosity was around 50%, and the pore diameter was about 50 to 70 {Angstrom}.

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11 p.

Notes

OSTI as DE96006510

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  • 188. meeting of the Electrochemical Society, Chicago, IL (United States), 8-13 Oct 1995

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  • Other: DE96006510
  • Report No.: ANL/MSD/CP--86502
  • Report No.: CONF-951007--17
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 205960
  • Archival Resource Key: ark:/67531/metadc670087

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  • December 1995

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  • June 29, 2015, 9:42 p.m.

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  • Dec. 11, 2015, 2:56 p.m.

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You, Hoydoo; Huang, Kegang; Yoo, S. S. & Nagy, Z. In situ x-ray scattering study of incipient formation of porous silicon, article, December 1995; Illinois. (digital.library.unt.edu/ark:/67531/metadc670087/: accessed June 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.