Super TOF secondary ion mass spectroscopy using very highly charged primary ions up to Th{sup 70+}

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The LLNL Electron Beam Ion Trap (EBIT) has made low emittance beams of slow highly charged ions available for ion-solid interaction studies. Such interactions feature the dominance of electronic over collisional effects, and the shock waves generated by the ionized target atoms can desorb large numbers of large molecular species from the surface. This paper presents the first systematic study of the sputtering process due to the incidence of slow very highly charged ions; Th{sup 70+} ions are extracted from EBIT at 7 keV{sup *}q and directed onto thin SiO{sub 2} films on Si. Results suggest secondary ion yields of ... continued below

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6 p.

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Briere, M.A.; Schenkel, T. & Schneider, D. October 1, 1995.

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Description

The LLNL Electron Beam Ion Trap (EBIT) has made low emittance beams of slow highly charged ions available for ion-solid interaction studies. Such interactions feature the dominance of electronic over collisional effects, and the shock waves generated by the ionized target atoms can desorb large numbers of large molecular species from the surface. This paper presents the first systematic study of the sputtering process due to the incidence of slow very highly charged ions; Th{sup 70+} ions are extracted from EBIT at 7 keV{sup *}q and directed onto thin SiO{sub 2} films on Si. Results suggest secondary ion yields of up to 25 per incident ion for Th{sup 70+} (secondary ion yield is increased over that for singly or moderately charged ions). Correlations of the negative, positive, and negative cluster ion yields show promise for application of highly charged ion induced sputtering for enhanced sensitivity and quantitative (absolute) SIMS analysis of deep submicron scale surface layers and polymeric and biomolecular material analysis.

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6 p.

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INIS; OSTI as DE96004535

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  • 10. international conference on secondary ion mass spectrometry and related techniques, Muenster (Germany), 1-6 Oct 1995

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  • Other: DE96004535
  • Report No.: UCRL-JC--122147
  • Report No.: CONF-9510323--1
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 201647
  • Archival Resource Key: ark:/67531/metadc669994

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  • October 1, 1995

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  • June 29, 2015, 9:42 p.m.

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  • Feb. 23, 2016, 6:55 p.m.

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Briere, M.A.; Schenkel, T. & Schneider, D. Super TOF secondary ion mass spectroscopy using very highly charged primary ions up to Th{sup 70+}, article, October 1, 1995; California. (digital.library.unt.edu/ark:/67531/metadc669994/: accessed October 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.