Near perfect optics

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Description

This report discusses a novel fabrication process to produce nearly perfect optics. The process utilizes vacuum deposition techniques to optimally modify polished optical substrate surfaces. The surface figure, i.e. contour of a polished optical element, is improved by differentially filling in the low spots on the surface using flux from a physical vapor deposition source through an appropriate mask. The process is expected to enable the manufacture of diffraction-limited optical systems for the UV, extreme UV, and soft X-ray spectral regions, which would have great impact on photolithography and astronomy. This same technique may also reduce the fabrication cost of ... continued below

Physical Description

26 p.

Creation Information

Goeke, R.; Farnsworth, A.V.; Neumann, C.C.; Sweatt, W.C.; Warren, M.E. & Weed, J.W. June 1, 1996.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This report discusses a novel fabrication process to produce nearly perfect optics. The process utilizes vacuum deposition techniques to optimally modify polished optical substrate surfaces. The surface figure, i.e. contour of a polished optical element, is improved by differentially filling in the low spots on the surface using flux from a physical vapor deposition source through an appropriate mask. The process is expected to enable the manufacture of diffraction-limited optical systems for the UV, extreme UV, and soft X-ray spectral regions, which would have great impact on photolithography and astronomy. This same technique may also reduce the fabrication cost of visible region optics with aspheric surfaces.

Physical Description

26 p.

Notes

OSTI as DE96012178

Source

  • Other Information: PBD: Jun 1996

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Identifier

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  • Other: DE96012178
  • Report No.: SAND--96-1367
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/251600 | External Link
  • Office of Scientific & Technical Information Report Number: 251600
  • Archival Resource Key: ark:/67531/metadc669822

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • June 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

Description Last Updated

  • April 13, 2016, 4:01 p.m.

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Goeke, R.; Farnsworth, A.V.; Neumann, C.C.; Sweatt, W.C.; Warren, M.E. & Weed, J.W. Near perfect optics, report, June 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc669822/: accessed December 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.