Statistics: A reaction mechanism for titanium nitride CVD from TiCl{sub 4} and NH{sub 3}

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 144 times , with 6 in the last month . More information about this article can be viewed below.

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2018 10 3 14 6 8 7 8 15 11 3 85
2017 4 0 0 1 0 1 1 3 9 2 4 0 25
2016 1 2 2 2 4 4 2 4 1 2 6 3 33
2015 0 0 0 0 0 0 0 0 0 0 0 1 1

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