Statistics: A reaction mechanism for titanium nitride CVD from TiCl{sub 4} and NH{sub 3}

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 156 times , with 6 in the last month . More information about this article can be viewed below.

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