Larson, R. S. & Allendorf, M. D. A reaction mechanism for titanium nitride CVD from TiCl{sub 4} and NH{sub 3}, article, December 1995; (https://digital.library.unt.edu/ark:/67531/metadc669389/m1/1/: accessed July 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; .