Novel MCM interconnection analysis using Capacitive Charge Generation (CCG)

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Description

A new SEM technique, Capacitive Charge Generation (CCG), has been developed to rapidly image MCM interconnection continuity. The new technique uses low primary electron beam energies (< 2.0 keV), very high beam currents (>100 nA), and fast electron beam scan rates (>5 frames/second) to probe buried conductors in MCMS. For these conditions, new surface charging effects have been observed that enable examination of conductors under thick insulating layers. CCG has been applied to conductors covered by over 90 {mu}m of polymer dielectric. The physics of CCG signal generation and applications for MCM failure analysis are described.

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10 p.

Creation Information

Cole, E.I. Jr.; Peterson, K.A. & Burton, D.L. March 1, 1996.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A new SEM technique, Capacitive Charge Generation (CCG), has been developed to rapidly image MCM interconnection continuity. The new technique uses low primary electron beam energies (< 2.0 keV), very high beam currents (>100 nA), and fast electron beam scan rates (>5 frames/second) to probe buried conductors in MCMS. For these conditions, new surface charging effects have been observed that enable examination of conductors under thick insulating layers. CCG has been applied to conductors covered by over 90 {mu}m of polymer dielectric. The physics of CCG signal generation and applications for MCM failure analysis are described.

Physical Description

10 p.

Notes

OSTI as DE96006997

Source

  • 34. annual international reliability physics symposium, Dallas, TX (United States), 30 Apr - 2 May 1996

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  • Other: DE96006997
  • Report No.: SAND--95-2255C
  • Report No.: CONF-960429--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 220599
  • Archival Resource Key: ark:/67531/metadc669306

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • March 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 13, 2016, 4:05 p.m.

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Cole, E.I. Jr.; Peterson, K.A. & Burton, D.L. Novel MCM interconnection analysis using Capacitive Charge Generation (CCG), article, March 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc669306/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.