RF magnetron sputter-deposition of La{sub 0.5}CoO{sub 3}//Pt composite electrodes for Pb(Zr,Ti)O{sub 3} thin film capacitors

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La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films have been deposited using RF magnetron sputter-deposition for use as an electrode material for PZT (PbZrTiO{sub 3}) thin film capacitors. Effect of O{sub 2}:Ar sputter gas ratio during deposition, on LSCO film properties was studied. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O{sub 2}: Ar ratio was increased for both as-deposited and annealed films. It was also found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low ... continued below

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6 p.

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Raymond, M.V.; Al-Shareef, H.N.; Tuttle, B.A.; DiMos, D. & Evans, J.T. July 1, 1996.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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La{sub 0.5}Sr{sub 0.5}CoO{sub 3} (LSCO) thin films have been deposited using RF magnetron sputter-deposition for use as an electrode material for PZT (PbZrTiO{sub 3}) thin film capacitors. Effect of O{sub 2}:Ar sputter gas ratio during deposition, on LSCO film properties was studied. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O{sub 2}: Ar ratio was increased for both as-deposited and annealed films. It was also found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers are discussed.

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6 p.

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OSTI as DE96011699

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 8-12 Apr 1996

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  • Other: DE96011699
  • Report No.: SAND--96-1478C
  • Report No.: CONF-960401--58
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 253368
  • Archival Resource Key: ark:/67531/metadc668578

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • July 1, 1996

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  • June 29, 2015, 9:42 p.m.

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  • April 14, 2016, 12:24 p.m.

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Raymond, M.V.; Al-Shareef, H.N.; Tuttle, B.A.; DiMos, D. & Evans, J.T. RF magnetron sputter-deposition of La{sub 0.5}CoO{sub 3}//Pt composite electrodes for Pb(Zr,Ti)O{sub 3} thin film capacitors, article, July 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc668578/: accessed October 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.