Characterization of SAL605 negative resist at {lambda}=13 nm Metadata

Metadata describes a digital item, providing (if known) such information as creator, publisher, contents, size, relationship to other resources, and more. Metadata may also contain "preservation" components that help us to maintain the integrity of digital files over time.

Title

  • Main Title Characterization of SAL605 negative resist at {lambda}=13 nm

Creator

  • Author: La Fontaine, B.
    Creator Type: Personal
  • Author: Ciarlo, D.
    Creator Type: Personal
  • Author: Gaines, D.P.
    Creator Type: Personal
  • Author: Kania, D.R.
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)

Publisher

  • Name: Lawrence Livermore National Laboratory
    Place of Publication: California
    Additional Info: Lawrence Livermore National Lab., CA (United States)

Date

  • Creation: 1996-05-24

Language

  • English

Description

  • Content Description: We have characterized the response of the negative resist SAL605 in the extreme ultraviolet ({lambda}=13 nm). The sensitivity was found to be {approx}1 mJ/cm{sup 3} for all conditions studied. We have identified processing conditions leading to high ({gamma}{gt}4) contrast. The resist response was modeled using Prolith/2 and the development parameters were obtained from the exposure curves.
  • Physical Description: 5 p.

Subject

  • Keyword: Photochemistry
  • Keyword: Radiation Doses
  • Keyword: Polymers
  • STI Subject Categories: 36 Materials Science
  • Keyword: Physical Radiation Effects
  • Keyword: Printed Circuits
  • Keyword: Extreme Ultraviolet Radiation
  • Keyword: Laser-Produced Plasma
  • Keyword: Tungsten
  • Keyword: Fabrication
  • Keyword: Microelectronic Circuits
  • Keyword: Processing
  • STI Subject Categories: 42 Engineering Not Included In Other Categories
  • Keyword: Screen Printing

Source

  • Conference: Optical Society of America (OSA) meeting on integrated photonics research, Boston, MA (United States), 29 Apr - 3 May 1996

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Other: DE96012224
  • Report No.: UCRL-JC--123012
  • Report No.: CONF-960493--14
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 251202
  • Archival Resource Key: ark:/67531/metadc668339

Note

  • Display Note: OSTI as DE96012224