Characterization of SAL605 negative resist at {lambda}=13 nm Metadata

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  • Main Title Characterization of SAL605 negative resist at {lambda}=13 nm


  • Author: La Fontaine, B.
    Creator Type: Personal
  • Author: Ciarlo, D.
    Creator Type: Personal
  • Author: Gaines, D.P.
    Creator Type: Personal
  • Author: Kania, D.R.
    Creator Type: Personal


  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)


  • Name: Lawrence Livermore National Laboratory
    Place of Publication: California
    Additional Info: Lawrence Livermore National Lab., CA (United States)


  • Creation: 1996-05-24


  • English


  • Content Description: We have characterized the response of the negative resist SAL605 in the extreme ultraviolet ({lambda}=13 nm). The sensitivity was found to be {approx}1 mJ/cm{sup 3} for all conditions studied. We have identified processing conditions leading to high ({gamma}{gt}4) contrast. The resist response was modeled using Prolith/2 and the development parameters were obtained from the exposure curves.
  • Physical Description: 5 p.


  • Keyword: Photochemistry
  • Keyword: Radiation Doses
  • Keyword: Polymers
  • STI Subject Categories: 36 Materials Science
  • Keyword: Physical Radiation Effects
  • Keyword: Printed Circuits
  • Keyword: Extreme Ultraviolet Radiation
  • Keyword: Laser-Produced Plasma
  • Keyword: Tungsten
  • Keyword: Fabrication
  • Keyword: Microelectronic Circuits
  • Keyword: Processing
  • STI Subject Categories: 42 Engineering Not Included In Other Categories
  • Keyword: Screen Printing


  • Conference: Optical Society of America (OSA) meeting on integrated photonics research, Boston, MA (United States), 29 Apr - 3 May 1996


  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI


  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article


  • Text


  • Other: DE96012224
  • Report No.: UCRL-JC--123012
  • Report No.: CONF-960493--14
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 251202
  • Archival Resource Key: ark:/67531/metadc668339


  • Display Note: OSTI as DE96012224