EUVL reticle factory model and reticle cost analysis

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The key issues in reticle manufacturing are cost and delivery time, both of which are dependent upon the yield of the process line. To estimate the cost and delivery time for EUVL reticles in commercial manufacturing, we have developed the first model for an EUV reticle factory which includes all the tools required for a presumed EUVL reticle fabrication process. This model includes the building, support tools and sufficient ``in-line`` process tools for the manufacture of (more than) 2500 reticles per year. Industry specifications for the tool performance are used to determine the number of tools required per process step ... continued below

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13 p.

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Hawryluk, A.M.; Shelden, G. & Troccolo, P. May 22, 1996.

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Description

The key issues in reticle manufacturing are cost and delivery time, both of which are dependent upon the yield of the process line. To estimate the cost and delivery time for EUVL reticles in commercial manufacturing, we have developed the first model for an EUV reticle factory which includes all the tools required for a presumed EUVL reticle fabrication process. This model includes the building, support tools and sufficient ``in-line`` process tools for the manufacture of (more than) 2500 reticles per year. Industry specifications for the tool performance are used to determine the number of tools required per process step and the average number of reticles fabricated per year. Building and capital equipment depreciation costs, tool installation costs, tool maintenance costs, labor, clean room costs, process times and process yields are estimated and used to calculate the yearly operating cost of the reticle factory and the average reticle fabrication cost. We estimate the sales price of an EUV reticle to be $60K for non-critical levels and $120K for ``leading-edge.`` The average reticle fabrication time is calculated for three different process-line yields.

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13 p.

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OSTI as DE96011624

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  • Optical Society of America (OSA) meeting on integrated photonics research, Boston, MA (United States), 29 Apr - 3 May 1996

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  • Other: DE96011624
  • Report No.: UCRL-JC--123011
  • Report No.: CONF-960493--13
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 251137
  • Archival Resource Key: ark:/67531/metadc668150

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • May 22, 1996

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  • June 29, 2015, 9:42 p.m.

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  • Feb. 18, 2016, 3:27 p.m.

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Hawryluk, A.M.; Shelden, G. & Troccolo, P. EUVL reticle factory model and reticle cost analysis, article, May 22, 1996; California. (digital.library.unt.edu/ark:/67531/metadc668150/: accessed November 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.