Vibration control for precision manufacturing using piezoelectric actuators

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Piezoelectric actuators provide high frequency, force, and stiffness capabilities along with reasonable Stroke limits, all of which can be used to increase performance levels in precision manufacturing systems. This paper describes two examples of embedding piezoelectric actuators in structural components for vibration control. One example involves suppressing the self excited chatter phenomenon in the metal cutting process of a milling machine and the other involves damping vibrations induced by rigid body stepping of a photolithography platen. Finite element modeling and analyses are essential for locating and sizing the actuators and permit further simulation studies of the response of the dynamic ... continued below

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20 p.

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Martinez, D.R.; Hinnerichs, T.D. & Redmond, J.M. December 31, 1995.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 239 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Piezoelectric actuators provide high frequency, force, and stiffness capabilities along with reasonable Stroke limits, all of which can be used to increase performance levels in precision manufacturing systems. This paper describes two examples of embedding piezoelectric actuators in structural components for vibration control. One example involves suppressing the self excited chatter phenomenon in the metal cutting process of a milling machine and the other involves damping vibrations induced by rigid body stepping of a photolithography platen. Finite element modeling and analyses are essential for locating and sizing the actuators and permit further simulation studies of the response of the dynamic system. Experimental results are given for embedding piezoelectric actuators in a cantilevered bar configuration, which was used as a surrogate machine tool structure. These results are incorporated into a previously developed milling process simulation and the effect of the control on the cutting process stability diagram is quantified. Experimental results are also given for embedding three piezoelectric actuators in a surrogate photolithography platen to suppress vibrations. These results demonstrate the potential benefit that can be realized by applying advances from the field of adaptive structures to problems in precision manufacturing.

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20 p.

Notes

OSTI as DE96004316

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  • 6. international conference on adaptive structures, Key West, FL (United States), 13-15 Nov 1995

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  • Other: DE96004316
  • Report No.: SAND--95-3027C
  • Report No.: CONF-9511165--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 197845
  • Archival Resource Key: ark:/67531/metadc667534

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  • December 31, 1995

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  • June 29, 2015, 9:42 p.m.

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  • April 14, 2016, 7:19 p.m.

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Martinez, D.R.; Hinnerichs, T.D. & Redmond, J.M. Vibration control for precision manufacturing using piezoelectric actuators, article, December 31, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc667534/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.