Metal-organic chemical vapor deposition of the blue electro-luminescent cerium-doped calcium thiogallate from a liquid reagent delivery system

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Deposition of CaS, Ga{sub 2}S{sub 3}, and CaGa{sub 2}S{sub 4}:Ce has been accomplished by MOCVD using Ca(tmhd){sub 2}, Ga(tmhd){sub 3}, and Ce(tmhd){sub 4}, with bubblers and with a liquid delivery system to control the flows. Samples were primarily characterized using x-ray fluorescence and electroluminescence measurements of the color and brightness. Deposition using the bubblers showed a definitive relationship between the Ga(tmhd){sub 3} bubbler temperature and the Ga XRF counts. The Ca conversion shows a tenuous relationship with the Ca(tmhd){sub 2} bubbler temperature, but the scatter of the data makes determining a correlation impractical. Use of the liquid delivery system is ... continued below

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9 p.

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Moss, T.S.; Dye, R.C.; Smith, D.C.; Samuels, J.A.; DelaRosa, M.J. & Schaus, C.F. December 31, 1995.

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Deposition of CaS, Ga{sub 2}S{sub 3}, and CaGa{sub 2}S{sub 4}:Ce has been accomplished by MOCVD using Ca(tmhd){sub 2}, Ga(tmhd){sub 3}, and Ce(tmhd){sub 4}, with bubblers and with a liquid delivery system to control the flows. Samples were primarily characterized using x-ray fluorescence and electroluminescence measurements of the color and brightness. Deposition using the bubblers showed a definitive relationship between the Ga(tmhd){sub 3} bubbler temperature and the Ga XRF counts. The Ca conversion shows a tenuous relationship with the Ca(tmhd){sub 2} bubbler temperature, but the scatter of the data makes determining a correlation impractical. Use of the liquid delivery system is preferred to the bubblers because it delivered a reliable reagent flow without the same problems of degradation of the reagent over time. Analysis shows the CaS deposition is mass transport limited, while the Ga{sub 2}S{sub 3} is limited by the deposition kinetics. However, application of these mechanisms to the CaGa{sub 2}S{sub 4}:Ce deposition system reveals that the CaGa{sub 2}S{sub 4}: Ce is independent of its components. Further, the deposition of CaGa{sub 2}S{sub 4}:Ce is found to be Ca rich under conditions which leads to lew Ga/Ca radios in the deposited film. This indicates that the conversion of Ca from Ca(tmhd){sub 2} was catalyzed by the slight presence of Ga in the form of CaGa{sub 2}S{sub 4}:Ce or Ga{sub 2}S{sub 3} on the surface. The Ca is thought to be deposited as CaS:Ce since there is a shift in the EL color towards green under low Ga/Ca ratios. The Ca conversion is also found to approach values predicted by the CaS deposition mechanism under conditions which lead to high Ga/Ca ratios, implying that excess Ga{sub 2}S{sub 3} is needed for the deposition of CaGa{sub 2}S{sub 4}:Ce without any CaS:Ce inclusions.

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9 p.

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OSTI as DE96007302

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  • Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995

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  • Other: DE96007302
  • Report No.: LA-UR--95-4500
  • Report No.: CONF-951155--51
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 207473
  • Archival Resource Key: ark:/67531/metadc667096

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • December 31, 1995

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  • June 29, 2015, 9:42 p.m.

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  • April 21, 2016, 9:55 p.m.

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Moss, T.S.; Dye, R.C.; Smith, D.C.; Samuels, J.A.; DelaRosa, M.J. & Schaus, C.F. Metal-organic chemical vapor deposition of the blue electro-luminescent cerium-doped calcium thiogallate from a liquid reagent delivery system, article, December 31, 1995; New Mexico. (digital.library.unt.edu/ark:/67531/metadc667096/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.