Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

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Description

An overview of surface micromachining projects at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.

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5 p.

Creation Information

Smith, J.H. February 1, 1996.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 14 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

An overview of surface micromachining projects at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.

Physical Description

5 p.

Notes

OSTI as DE96007672

Source

  • GOMAC `96: government microcircuit applications conference, Kissimee, FL (United States); Anaheim, CA (United States), 18-21 Mar 1996; 16-18 Apr 1996

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  • Other: DE96007672
  • Report No.: SAND--96-0099C
  • Report No.: CONF-9603121--1;CONF-9604112--1
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 206434
  • Archival Resource Key: ark:/67531/metadc666762

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

Description Last Updated

  • April 14, 2016, 5:47 p.m.

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Smith, J.H. Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory, article, February 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc666762/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.