Process control of large-scale finite element simulation software

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Description

We have developed a methodology for coupling large-scale numerical codes with process control algorithms. Closed-loop simulations were demonstrated using the Sandia-developed finite element thermal code TACO and the commercially available finite element thermal-mechanical code ABAQUS. This new capability enables us to use computational simulations for designing and prototyping advanced process-control systems. By testing control algorithms on simulators before building and testing hardware, enormous time and cost savings can be realized. The need for a closed-loop simulation capability was demonstrated in a detailed design study of a rapid-thermal-processing reactor under development by CVC Products Inc. Using a thermal model of the ... continued below

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42 p.

Creation Information

Spence, P.A.; Weingarten, L.I.; Schroder, K.; Tung, D.M. & Sheaffer, D.A. February 1, 1996.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Livermore, CA (United States)
    Place of Publication: Livermore, California

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Description

We have developed a methodology for coupling large-scale numerical codes with process control algorithms. Closed-loop simulations were demonstrated using the Sandia-developed finite element thermal code TACO and the commercially available finite element thermal-mechanical code ABAQUS. This new capability enables us to use computational simulations for designing and prototyping advanced process-control systems. By testing control algorithms on simulators before building and testing hardware, enormous time and cost savings can be realized. The need for a closed-loop simulation capability was demonstrated in a detailed design study of a rapid-thermal-processing reactor under development by CVC Products Inc. Using a thermal model of the RTP system as a surrogate for the actual hardware, we were able to generate response data needed for controller design. We then evaluated the performance of both the controller design and the hardware design by using the controller to drive the finite element model. The controlled simulations provided data on wafer temperature uniformity as a function of ramp rate, temperature sensor locations, and controller gain. This information, which is critical to reactor design, cannot be obtained from typical open-loop simulations.

Physical Description

42 p.

Notes

OSTI as DE96006553

Source

  • Other Information: PBD: Feb 1996

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  • Other: DE96006553
  • Report No.: SAND--96-8214
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/205962 | External Link
  • Office of Scientific & Technical Information Report Number: 205962
  • Archival Resource Key: ark:/67531/metadc665426

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Office of Scientific & Technical Information Technical Reports

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Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • February 1, 1996

Added to The UNT Digital Library

  • June 29, 2015, 9:42 p.m.

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  • April 12, 2016, 8:29 p.m.

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Spence, P.A.; Weingarten, L.I.; Schroder, K.; Tung, D.M. & Sheaffer, D.A. Process control of large-scale finite element simulation software, report, February 1, 1996; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc665426/: accessed October 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.