Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine

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We have previously described a practical micromachined power source: the polysilicon, surface-micromachined, electrostatically actuated microengine. Here we report on 3 aspects of implementing the microengine. First, we discuss demonstrations of the first-generation microengine actuating geared micromechanisms including gear trains with elements having dimensions comparable to the drive gear (about 50 {mu}m) and a relatively large (1600-{mu}m-diameter) rotating optical shutter element. These configurations span expected operating extremes for the microengine and address the coupling and loading issues for very-low-aspect-ratio micromechanisms which are common to the design of surface-micromachined devices. Second, we report on a second-generation of designs that utilize improved gear ... continued below

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6 p.

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Sniegowski, J.J.; Miller, S.L.; LaVigne, G.F.; Rodgers, M.S. & McWhorter, P.J. May 1, 1996.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We have previously described a practical micromachined power source: the polysilicon, surface-micromachined, electrostatically actuated microengine. Here we report on 3 aspects of implementing the microengine. First, we discuss demonstrations of the first-generation microengine actuating geared micromechanisms including gear trains with elements having dimensions comparable to the drive gear (about 50 {mu}m) and a relatively large (1600-{mu}m-diameter) rotating optical shutter element. These configurations span expected operating extremes for the microengine and address the coupling and loading issues for very-low-aspect-ratio micromechanisms which are common to the design of surface-micromachined devices. Second, we report on a second-generation of designs that utilize improved gear teeth design, a gear speed-reduction unit, and higher force-per-unit-area electrostatic comb drives. The speed-reduction unit produces an overall angular speed reduction of 9.63 and requires dual-level compound gears. Third, we discuss a dynamics model developed to accomplish 3 objectives: drive inertial loads in a controlled fashion, minimize stress and frictional forces during operation, and determine as a function of time the forces associated with the drive gear (eg load torque on drive gear from friction).

Physical Description

6 p.

Notes

OSTI as DE96010746

Source

  • Solid-state sensor and actuator workshop, Hilton Head, SC (United States), 2-6 Jun 1996

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  • Other: DE96010746
  • Report No.: SAND--96-0094C
  • Report No.: CONF-960673--4
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 230620
  • Archival Resource Key: ark:/67531/metadc664703

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  • May 1, 1996

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  • June 29, 2015, 9:42 p.m.

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  • April 13, 2016, 3:06 p.m.

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Sniegowski, J.J.; Miller, S.L.; LaVigne, G.F.; Rodgers, M.S. & McWhorter, P.J. Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine, article, May 1, 1996; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc664703/: accessed November 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.