A Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface Micromachining Technology

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Description

The design, fabrication and characterization of a low-voltage rotary stepper motor are presented in this work. Using a five-level polysilicon MEMS technology, steps were taken to increase the capacitance over previous stepper motor designs to generate high torque at low voltages. A low-friction hub was developed to minimize frictional loads due to rubbing surfaces, producing an estimated resistive torque of about 6 pN-m. This design also allowed investigations into the potential benefit of using hard materials such as silicon nitride for lining of both the stationary and rotating hub components. The result is an electrostatic stepper motor capable of operation ... continued below

Physical Description

4 p.

Creation Information

JAKUBCZAK II,JEROME F.; KRYGOWSKI,THOMAS W.; MILLER,SAMUEL L.; RODGERS,M. STEVEN & SNIEGOWSKI,JEFFRY J. September 22, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 14 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

The design, fabrication and characterization of a low-voltage rotary stepper motor are presented in this work. Using a five-level polysilicon MEMS technology, steps were taken to increase the capacitance over previous stepper motor designs to generate high torque at low voltages. A low-friction hub was developed to minimize frictional loads due to rubbing surfaces, producing an estimated resistive torque of about 6 pN-m. This design also allowed investigations into the potential benefit of using hard materials such as silicon nitride for lining of both the stationary and rotating hub components. The result is an electrostatic stepper motor capable of operation at less than six volts.

Physical Description

4 p.

Notes

OSTI as DE00014028

Medium: P; Size: 4 pages

Source

  • 1999 IEEE International Electron Devices Meeting, Washington, DC (US), 12/05/1999--12/08/1999

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  • Report No.: SAND99-2420C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 14028
  • Archival Resource Key: ark:/67531/metadc628232

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Creation Date

  • September 22, 1999

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • April 10, 2017, 8:14 p.m.

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JAKUBCZAK II,JEROME F.; KRYGOWSKI,THOMAS W.; MILLER,SAMUEL L.; RODGERS,M. STEVEN & SNIEGOWSKI,JEFFRY J. A Low-Voltage Rotary Actuator Fabricated Using a Five-Level Polysilicon Surface Micromachining Technology, article, September 22, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc628232/: accessed September 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.