Quantitative Determination of Dielectric Thin-Film Properties Using Infrared Emission Spectroscopy Page: 4 of 34
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Abstract
We have completed an experimental study to investigate the use of infrared
emission spectroscopy (IRES) for the quantitative analysis of borophosphosilicate glass (BPSG)
thin films on silicon monitor wafers. Experimental parameters investigated included
temperatures within the range used in the microelectronics industry to produce these films; hence
the potential for using the IRES technique for real-time monitoring of the film deposition process
has been evaluated. The film properties that were investigated included boron content,
phosphorus content, film thickness, and film temperature. The studies were conducted over two
temperature ranges, 125 to 225 *C and 300 to 400 *C. The later temperature range includes
realistic processing temperatures for the chemical vapor deposition (CVD) of the BPSG films.
Partial least squares (PLS) multivariate calibration methods were applied to spectral and film
property calibration data. The cross-validated standard errors of prediction (CVSEP) from the
PLS analysis of the IRES spectra of 21 calibration samples each measured at 6 temperatures in
the 300 to 400 *C range were found to be 0.09 wt. % for B, 0.08 wt. % for P, 3.6 pm for film
thickness, and 1.9 *C for temperature. By lowering the spectral resolution from 4 to 32 cm 1 and
decreasing the number of spectral scans from 128 to 1, we were able to determine that all the
film properties could be measured in less than one second to the precision required for the
manufacture and quality control of integrated circuits. Thus, real-time in-situ monitoring of
BPSG thin films formed by CVD deposition on Si monitor wafers is possible with the methods
reported here.
Key Words: BPSG films, PLS, IR emission spectra2
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Franke, J.E.; Haaland, D.M.; Niemczyk, T.M. & Zhang, S. Quantitative Determination of Dielectric Thin-Film Properties Using Infrared Emission Spectroscopy, article, October 14, 1998; Albuquerque, New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc627862/m1/4/: accessed March 28, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.