Analysis of the surface structure of HFCVD diamond films

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Description

Structure analysis was carried out on various surface features of diamond films using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The films were grown via hot filament assisted chemical vapor deposition (HFCVD) in methane and hydrogen gas mixtures. The authors investigated the surfaces of films grown under parameters selected to produce certain textures or surface features such as penetration twins or hopper shaped faces. The SEM images of these films show that the {l_brace}100{r_brace} planes are usually flatter than the {l_brace}111{r_brace}. The {l_brace}111{r_brace} planes show interesting growth features. The ``hopper`` shaped structures were imaged in the tapping mode ... continued below

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6 p.

Creation Information

Mehta, P.; Feigerle, C.S.; Clausing, R.E.; Heatherly, L. & Thundat, T. July 1, 1995.

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Description

Structure analysis was carried out on various surface features of diamond films using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The films were grown via hot filament assisted chemical vapor deposition (HFCVD) in methane and hydrogen gas mixtures. The authors investigated the surfaces of films grown under parameters selected to produce certain textures or surface features such as penetration twins or hopper shaped faces. The SEM images of these films show that the {l_brace}100{r_brace} planes are usually flatter than the {l_brace}111{r_brace}. The {l_brace}111{r_brace} planes show interesting growth features. The ``hopper`` shaped structures were imaged in the tapping mode of the AFM, and the angles between planes and their orientations have been determined. These AFM and SEM images are presented with quantitative analyses of the exposed surfaces. Detailed quantitative information will be useful in understanding the growth of these films.

Physical Description

6 p.

Notes

OSTI as DE95014263

Source

  • International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995

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  • Other: DE95014263
  • Report No.: CONF-950840--3
  • Grant Number: AC05-84OR21400
  • DOI: 10.2172/106570 | External Link
  • Office of Scientific & Technical Information Report Number: 106570
  • Archival Resource Key: ark:/67531/metadc627819

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 1, 1995

Added to The UNT Digital Library

  • June 16, 2015, 7:43 a.m.

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  • Aug. 23, 2016, 2:54 p.m.

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Mehta, P.; Feigerle, C.S.; Clausing, R.E.; Heatherly, L. & Thundat, T. Analysis of the surface structure of HFCVD diamond films, report, July 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc627819/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.