Deposition of biaxially textured yttria-stabilized zirconia by ion-beam-assisted deposition.

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Biaxially textured yttria (8 mol %)-stabilized zirconia (YSZ) thin films were deposited on randomly oriented Hastelloy C and Stainless Steel 304 at room temperature as a buffer layer for subsequent deposition of oriented YBa{sub 2}Cu{sub 3}O{sub x} films. The 0.16-1.3 {micro}m thick YSZ films were deposited by e-beam evaporation at rates of 1.2-3.2 {angstrom}/sec. Biaxially textured films were produced with an Ar/O{sub 2} ion beam directed at the substrate during film growth. X-ray diffraction was used to study in-plane and out-of-plane orientation as a function of ion-bombardment angle, film thickness, ion-to-atom flux ratio, and substrate material. In-plane and out-of-plane average-misorientation ... continued below

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7 p.

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Chudzik, M. P. September 17, 1998.

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Biaxially textured yttria (8 mol %)-stabilized zirconia (YSZ) thin films were deposited on randomly oriented Hastelloy C and Stainless Steel 304 at room temperature as a buffer layer for subsequent deposition of oriented YBa{sub 2}Cu{sub 3}O{sub x} films. The 0.16-1.3 {micro}m thick YSZ films were deposited by e-beam evaporation at rates of 1.2-3.2 {angstrom}/sec. Biaxially textured films were produced with an Ar/O{sub 2} ion beam directed at the substrate during film growth. X-ray diffraction was used to study in-plane and out-of-plane orientation as a function of ion-bombardment angle, film thickness, ion-to-atom flux ratio, and substrate material. In-plane and out-of-plane average-misorientation angles on these YSZ films that were deposited by ion-beam-assisted deposition were as low as 17 and 5.4{degree}, respectively, on as-received substrates.

Physical Description

7 p.

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OSTI as DE00010705

Medium: P; Size: 7 pages

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  • 1998 Applied Superconductivity Conference, Palm Desert, CA (US), 09/13/1998--09/18/1998

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  • Report No.: ANL/ET/CP-95981
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 10705
  • Archival Resource Key: ark:/67531/metadc627545

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  • September 17, 1998

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  • June 16, 2015, 7:43 a.m.

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  • April 11, 2017, 3:10 p.m.

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Chudzik, M. P. Deposition of biaxially textured yttria-stabilized zirconia by ion-beam-assisted deposition., article, September 17, 1998; Illinois. (digital.library.unt.edu/ark:/67531/metadc627545/: accessed November 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.