Plasma synthesis of rare earth doped integrated optical waveguides

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We describe a novel means for the production of optically active planar waveguides. The makes use of a low energy plasma deposition. Cathodic-arc-produced metal plasmas the metallic components of the films and gases are added to form compound films. Here we discuss the synthesis of Al{sub 2{minus}x}ER{sub x}O{sub 3} thin films. The erbium concentration (x) can vary from 0 to 100% and the thickness of the film can be from Angstroms to microns. In such material, at high active center concentration (x=l% to 20%), erbium ions give rise to room temperature 1.53{mu}m emission which has minimum loss in silica-based optical ... continued below

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6 p.

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Raoux, S.; Anders, S.; Yu, K.M.; Brown, I.G. & Ivanov, I.C. March 1, 1995.

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Description

We describe a novel means for the production of optically active planar waveguides. The makes use of a low energy plasma deposition. Cathodic-arc-produced metal plasmas the metallic components of the films and gases are added to form compound films. Here we discuss the synthesis of Al{sub 2{minus}x}ER{sub x}O{sub 3} thin films. The erbium concentration (x) can vary from 0 to 100% and the thickness of the film can be from Angstroms to microns. In such material, at high active center concentration (x=l% to 20%), erbium ions give rise to room temperature 1.53{mu}m emission which has minimum loss in silica-based optical fibers. With this technique, multilayer integrated planar waveguide structures can be grown, such as Al{sub 2}O{sub 3}/Al{sub 2{minus}x}Er{sub x}O{sub 3}/Al{sub 2}O{sub 3}/Si, for example.

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6 p.

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OSTI as DE95016465

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE95016465
  • Report No.: LBL--37267
  • Report No.: CONF-950412--43
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 110238
  • Archival Resource Key: ark:/67531/metadc626677

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  • March 1, 1995

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  • June 16, 2015, 7:43 a.m.

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  • April 5, 2016, 10:26 a.m.

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Raoux, S.; Anders, S.; Yu, K.M.; Brown, I.G. & Ivanov, I.C. Plasma synthesis of rare earth doped integrated optical waveguides, article, March 1, 1995; California. (digital.library.unt.edu/ark:/67531/metadc626677/: accessed August 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.