Electron field emission from undoped and doped DLC films

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Electron field emission and electrical conductivity of undoped and nitrogen doped DLC films have been investigated. The films were grown by the PE CVD method from CH{sub 4}:H{sub 2} and CH{sub 4}:H{sub 2}:N{sub 2} gas mixtures, respectively. By varying nitrogen content in the gas mixture over the range 0 to 45%, corresponding concentrations of 0 to 8 % (atomic) could be achieved in the films. Three different gas pressures were used in the deposition chamber: 0.2, 0.6 and 0.8 Torr. Emission current measurements were performed at approximately 10{sup -6} Torr using the diode method with emitter-anode spacing set at 20 ... continued below

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707 Kilobytes pages

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Chakhovskoi, A G; Evtukh, A A; Felter, T E; Klyui, N I; Kudzinovsky, S Y; Litovchenko, V G et al. June 1, 1999.

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Electron field emission and electrical conductivity of undoped and nitrogen doped DLC films have been investigated. The films were grown by the PE CVD method from CH{sub 4}:H{sub 2} and CH{sub 4}:H{sub 2}:N{sub 2} gas mixtures, respectively. By varying nitrogen content in the gas mixture over the range 0 to 45%, corresponding concentrations of 0 to 8 % (atomic) could be achieved in the films. Three different gas pressures were used in the deposition chamber: 0.2, 0.6 and 0.8 Torr. Emission current measurements were performed at approximately 10{sup -6} Torr using the diode method with emitter-anode spacing set at 20 {micro}m. The current - voltage characteristics of the Si field electron emission arrays covered with DLC films show that threshold voltage (V{sub th}) varies in a complex manner with nitrogen content. As a function of nitrogen content, V{sub th} initially increases rapidly, then decreases and finally increases again for the highest concentration. Corresponding Fowler-Nordheim (F-N) plots follow F-N tunneling over a wide range. The F-N plots were used for determination of the work function, threshold voltage, field enhancement factor and effective emission area. For a qualitative explanation of experimental results, we treat the DLC film as a diamond-like (sp{sup 3} bonded) matrix with graphite-like inclusions.

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707 Kilobytes pages

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  • Materials Research Society Spring '99 Meeting, San Francisco, CA (US), 04/05/1999--04/09/1999

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  • Report No.: UCRL-JC-134060--Rev-1
  • Report No.: YN0100000
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 13796
  • Archival Resource Key: ark:/67531/metadc625994

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  • June 1, 1999

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  • June 16, 2015, 7:43 a.m.

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  • May 6, 2016, 1:15 p.m.

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Chakhovskoi, A G; Evtukh, A A; Felter, T E; Klyui, N I; Kudzinovsky, S Y; Litovchenko, V G et al. Electron field emission from undoped and doped DLC films, article, June 1, 1999; California. (digital.library.unt.edu/ark:/67531/metadc625994/: accessed December 14, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.